MicroNanoSystems July 2007
| Editor's Comments |
| The emerging markets in the high technology world are at a critical stage. Although growth percentages are expected to be huge they need to be put in perspective of the market size. MEMS are further on the cusp of success than ever before and the next few years will see an increase in devices and growth. |
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| Cover Story |
An automated tool for double-sided overlay metrology
The use of backside patterning is experiencing strong growth due to the increasing popularity of MEMS devices, 3D Integration and communication products. The constant demand for new device features such as through-silicon vias (TSV’s) as well as greater functionality within existing devices has fuelled a demand for more efficient use of wafer real estate on the front and backside of the wafer. Keith A. Cooper and Thomas Huelsmann, SUSS MicroTec discuss. |
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MicroNanoSystems
Thin Wafer Processing in High Vol. Manufacturing
To meet the demand of device size reduction, manufacturers continue to look for ways to reduce component space. Stefan Pargfrieder, Paul Linder, EVG Group and Steven Dwyer, Thorsten Matthias, EVG U.S. discuss two methods. |
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MicroNanoSystems
Introduction to Deep Silicon Etching
New technology developments require, advanced methods of manufacturing. Dr Yiping Song and Dave Thomas, Aviza Technology discuss the versatility of using Si etch and polymer deposition to improve results using the Bosh Process. |
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MicroNanoSystems
Flat Out For The Future
New technologies and devices are are usually pioneered during production Dr. Mike Cooke, Technology Journalist reports on a the prospects of graphene, a new material in nano fabrication. |
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MicroNanoSystems
Processing Polymer Electronics
Revolutionary technology, Dr Alec Reader Innos discusses polymer electronics as a possible successor to silicon. |
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MicroNanoSystems
New-energy-efficient products
Micron Technology discuss their new power efficient range. |
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MicroNanoSystems
Advancing state-of-the-art in FinFET’s
IMEC presents some promising results. |
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